Method for obtaining vacuum of vacuum pump


The obtaining of vacuum is the main component of vacuum technology. With a variety of methods, a certain degree of vacuum can be obtained in the pumped container. The range of currently available vacuum is quite wide, from 100kPa to 10-11Pa. In other words, it should be from 100kPa to 10-4Pa.

Therefore, different methods should be used to obtain vacuum according to different vacuum requirements and use conditions. The existing methods to obtain vacuum can be roughly divided into the following three categories: vacuum pumps (such as mechanical pumps, diffusion pumps, etc.), getters (red Phosphorus, barium aluminum, titanium, ZrAl16, etc.) and vapor traps (cold traps, dryers, etc.). In the electric light source industry, the main means to obtain a vacuum is to rely on a mechanical vacuum pump and a vapor flow diffusion vacuum pump.

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